When to Use Interferometry Techniques for Surface Characterization

Surface characterization results at the nanometer level will be significantly impacted depending on the imaging technique applied. We use a several Sensofar surface analysis tools to measure and characterize surfaces in our lab. We occasionally use a confocal technology, a focus variation technology, or interferometry. Each has its place, and we are fortunate to have the tools to incorporate all these methods.

3 Modes of Interferometry [VIDEO TUTORIAL]

Check out this detailed video tutorial showing how we characterizes a wafer utilizing this technology. The video covers:

  1. PSI – Phase Shifting Interferometry
  2. ePSI – Extended Phase Shifting Interferometry
  3. CSI – Coherence Scanning Interferometry

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