The article below explains how to perform fast, non-destructive measurements of the deflection membrane in a pressure sensor that measures pressure changes within living cells.
The pressure sensor is a 6×10 µm chip comprised of a mechanical sensor with two polysilicon membranes separated by a vacuum gap and an optical reference area.
When we perform membrane deflection measurements using scanning electronic microscopy (SEM), the samples must be under vacuum pressure which may alter their initial state.
Learn how a Sensofar optical profiler enables us to measure, in a quick and non-destructive way, the deflection of the membranes in these biological sensors after manufacturing.
